The rational design of polymeric EUV resist materials by QSPR modelling.
| Autor: | Jack, Kevin, Liu, Heping, Blakey, Idriss, Hill, David, Yueh, Wang, Cao, Heidi, Leeson, Michael, Denbeaux, Greg, Waterman, Justin, Whittaker, Andrew |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65193Z-65193Z-8, 8p |
| Databáze: | Complementary Index |
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