OPC in memory-device patterns using boundary layer model for 3-dimensional mask topographic effect.
| Autor: | Kim, Young-Chang, Kim, Insung, Park, JeongGeun, Kim, Sangwook, Suh, Sungsoo, Cheon, Yongjin, Lee, Sukjoo, Lee, Junghyeon, Kang, Chang-Jin, Moon, Jootae, Cobb, Jonathan, Lee, Sooryong |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65200T-65200T-12, 12p |
| Databáze: | Complementary Index |
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