Challenges and solutions for transferring a 248-nm process to 365-nm imaging.
| Autor: | Serebriakov, Alexander, Chang, Chicheng, Becht, Arthur, Pluijms, Rene, Cheng, Anthony, Shi, Elly, van den Broek, Han, Zhao, Li |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65204L-65204L-9, 9p |
| Databáze: | Complementary Index |
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