Formation of 4-beam laser interference patterns for nanolithography.
| Autor: | Zhang, Jin, Wang, Zuobin, Verevkin, Yury K., Olaizola, Santiago M., Peng, Changsi, Tan, Chunlei, Rodriguez, Ainara, Daume, Eric Y., Berthou, Thierry, Tisserand, Stéphane, Ji, Ze |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65930I-65930I-8, 8p |
| Databáze: | Complementary Index |
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