Fast file size estimation of mask data conversion from OASIS to GDS2.
| Autor: | Endo, Masakazu, Taniguchi, Yoshiyuki, Nishizawa, Kuninori, Kato, Kokoro |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66072P-66072P-8, 8p |
| Databáze: | Complementary Index |
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