New OPC method for contact layer to expand process margin.
| Autor: | Oka, Mikio, Oishi, Hidetoshi, Tsuchiya, Kensuke, Ohnuma, Hidetoshi |
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| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p660732-660732-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Oka, Mikio, Oishi, Hidetoshi, Tsuchiya, Kensuke, Ohnuma, Hidetoshi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p660732-660732-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|