Scatterometry from crossed grating structures in different configurations.
| Autor: | Schuster, Thomas, Rafler, Stephan, Osten, Wolfgang, Reinig, Peter, Hingst, Thomas |
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| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p661715-661715-9, 9p |
| Databáze: | Complementary Index |
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