Closed loop high precision position control system with optical scale.
| Autor: | Ge, Cheng-liang, Liao, Yuan, He, Zhong-wu, Luo, Zhong-xiang, Huang, Zhi-wei, Wan, Min, Hu, Xiao-yang, Fan, Guo-bin, Liang, Zheng |
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| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p662418-662418-7, 7p |
| Databáze: | Complementary Index |
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