Study on the effects of depositing parameters on the protection performance of plasma polymerized hexamethyldisiloxane coatings.

Autor: Zhang, Rongfu, Zhu, Xumin, Pan, Chao
Zdroj: Proceedings of SPIE; Nov2007 Part 2, Issue 1, p67220Z-67220Z-4, 4p
Databáze: Complementary Index