Compensating for image placement errors induced during the fabrication and chucking of EUVL masks.
| Autor: | Engelstad, Roxann L., Sohn, Jaewoong, Mikkelson, Andrew R., Nataraju, Madhura, Turner, Kevin T. |
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| Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p673004-673004-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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