Integration of OPC and mask data preparation for reduced data I/O and reduced cycle time.
| Autor: | Morgan, Ray, Chacko, Manoj, Hung, Dan, Yeap, Johnny, Boman, Mathias |
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| Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p67304E-67304E-7, 7p |
| Databáze: | Complementary Index |
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