Scanning nanojet lithograph and microscope.
Autor: | Timoshchenko, Igor A. |
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Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p69373S-69373S-5, 5p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Timoshchenko, Igor A. |
---|---|
Zdroj: | Proceedings of SPIE; Nov2007 Part 2, Issue 1, p69373S-69373S-5, 5p |
Databáze: | Complementary Index |
Externí odkaz: |