Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes.
| Autor: | Walecki, Wojciech J., Azfar, Talal, Pravdivstev, Alexander, Santos II, Manuel, Koo, Ann |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p61090J-61090J-8, 8p |
| Databáze: | Complementary Index |
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