Growth and characterization of AlGaN/GaN epitaxial layers by MOCVD on SiC substrates for RF device applications.

Autor: Sood, Ashok K., Singh, Rajwinder, Puri, Yash R., Clarke, Frederick W., Laboutin, Oleg, Deluca, Paul M., Wesler, Roger E., Deng, Jie, Hwang, James C. M.
Zdroj: Proceedings of SPIE; Nov2006, Issue 1, p61210D-61210D-13, 13p
Databáze: Complementary Index