First performance results of the ASML alpha demo tool.
| Autor: | Meiling, Hans, Meijer, Henk, Banine, Vadim, Moors, Roel, Groeneveld, Rogier, Voorma, Harm-Jan, Mickan, Uwe, Wolschrijn, Bas, Mertens, Bas, van Baars, Gregor, Kürz, Peter, Harned, Noreen |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615108-615108-12, 12p |
| Databáze: | Complementary Index |
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