Performance and quality analysis of Mo-Si multilayers deposited by ion beam sputtering and magnetron sputtering.
| Autor: | Hiruma, Kenji, Miyagaki, Shinji, Yamanashi, Hiromasa, Tanaka, Yuusuke, Cullins, Jerry, Nishiyama, Iwao |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61511V-61511V-8, 8p |
| Databáze: | Complementary Index |
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