Yield enhancement methodologies for 90-nm technology and beyond.
| Autor: | Allgair, John, Carey, Todd, Dougan, James, Etnyre, Tony, Langdon, Nate, Murray, Brooke |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615208-615208-8, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|