Scatterometry measurements of line end shortening structures for focus-exposure monitoring.
| Autor: | Hung, Kelvin, Cheng, Yung Feng, Sun, Jie Wei, Lin, Benjamin Szu-Min, Fu, Steven, Dziura, Thaddeus G., Cusacovich, Marcelo, Mieher, Walter D. |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61521W-61521W-12, 12p |
| Databáze: | Complementary Index |
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