Probabilistic calibration of a simple resist model for simulation-based scoring of mask defects.
| Autor: | Luk-Pat, Gerard T., Kondepudy, Raghava V., Du, Robert, Morgan, Ray E. |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61522P-61522P-12, 12p |
| Databáze: | Complementary Index |
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