Carbon nanotube AFM probes for microlithography process control.
| Autor: | Liu, Hao-Chih, Fong, David, Dahlen, Gregory A., Osborn, Marc, Hand, Sean, Osborne, Jason R. |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61522Y-61522Y-11, 11p |
| Databáze: | Complementary Index |
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