Spectroscopic polarized scatterometry applied to single-line profiling.
| Autor: | Stehlé, Jean-Louis, Piel, Jean-Philippe, Campillo, Jose, Zahorski, Dorian, Giovannini, Hugues |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61522Z-61522Z-7, 7p |
| Databáze: | Complementary Index |
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