Diffraction signature analysis methods for improving scatterometry precision.
| Autor: | Littau, Mike, Forman, Darren, Bruce, Josh, Raymond, Christopher J., Hummel, Steven G. |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615236-615236-10, 10p |
| Databáze: | Complementary Index |
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