Use of modified bottom anti-reflective coatings as a general solution to resist poisoning.
| Autor: | Beach, James V., Nowak, Kelly A., McGowan, Ricky, Pfeifer, Klaus |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61532R-61532R-9, 9p |
| Databáze: | Complementary Index |
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