Characterization of imaging performance for immersion lithography at NA=0.93.
| Autor: | Gil, Dario, Tirapu-Azpiroz, Jaione, Deschner, Ryan, Brunner, Timothy, Fonseca, Carlos, Fullam, Jennifer, Corliss, Dan, Auschnitt, Kit, Vanoppen, Peter |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615405-615405-14, 14p |
| Databáze: | Complementary Index |
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