Characterization of imaging performance for immersion lithography at NA=0.93.
Autor: | Gil, Dario, Tirapu-Azpiroz, Jaione, Deschner, Ryan, Brunner, Timothy, Fonseca, Carlos, Fullam, Jennifer, Corliss, Dan, Auschnitt, Kit, Vanoppen, Peter |
---|---|
Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615405-615405-14, 14p |
Databáze: | Complementary Index |
Externí odkaz: |