High-transmission mask technology for 45nm node imaging.
Autor: | Conley, Will, Morgana, Nicoló, Kasprowicz, Bryan S., Cangemi, Mike, Lassiter, Matt, Litt, Lloyd C., Cangemi, Marc, Cottle, Rand, Wu, Wei, Cobb, Jonathan, Ham, Young-Mog, Lucas, Kevin, Roman, Bernie, Progler, Chris |
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Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61541D-61541D-10, 10p |
Databáze: | Complementary Index |
Externí odkaz: |