The improvement of DOF for sub-100nm process by focus scan.

Autor:	Kim, Jung-Chan, Yang, Hyun-Jo, Jeon, Jin-Hyuck, Park, Chan-Ha, Moon, James, Yim, Dong-gyu, Kim, Jin-Woong, Tseng, Shih-en, Rhe, Kyu-Kab, Min, Young-Hong, Chen, Alek C.
Zdroj:	Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61541K-61541K-9, 9p
Databáze:	Complementary Index
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