DOF enhancement for contact holes by using Nikon's CDP option and its introduction into production.
| Autor: | Armellin, Louis-Pierre, Dureuil, Virginie, Nuel, Laurent, Salvetat, Vincent, Meier, Winfried, Kraft, Andreas |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61542B-61542B-10, 10p |
| Databáze: | Complementary Index |
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