Analysis of the combined impact of the laser spectrum, illuminator miscalibrations, and lens aberrations on the 90nm technology node imaging with off-axis illuminations.
| Autor: | Loi, Sara, Iessi, Umberto, Chung, Robert |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p615434-615434-11, 11p |
| Databáze: | Complementary Index |
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