Integration of the retical systematic CD errors into an OPC modeling and correction.
| Autor: | Han, Geng, Mansfield, Scott, Krasnoperova, Azalia |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61543I-61543I-10, 10p |
| Databáze: | Complementary Index |
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