Process window OPC for reduced process variability and enhanced yield.
| Autor: | Krasnoperova, Azalia, Culp, James A., Graur, Ioana, Mansfield, Scott, Al-Imam, Mohamed, Maaty, Hesham |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61543L-61543L-12, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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