Building a computational model for process and proximity compensation.
| Autor: | Perçin, Gökhan, Huang, Hsu-Ting, Zach, Franz X., Sezginer, Apo, Mokhberi, Ali |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61543N-61543N-10, 10p |
| Databáze: | Complementary Index |
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