RET for the wiring layer of a 3D memory.
Autor: | Chen, Yung-Tin, Poon, Paul, Petti, Chris, Kamat, Vishnu, Sezginer, Apo, Huang, Hsu-Ting |
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Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61561E-61561E-8, 8p |
Databáze: | Complementary Index |
Externí odkaz: |