Use of thermomigration in MEMS technology.
| Autor: | Buchin, Eduard Y., Denisenko, Yuri I. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62601L-62601L-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Buchin, Eduard Y., Denisenko, Yuri I. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62601L-62601L-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|