Vacuum technological equipment for microphotoelectronic production.
| Autor: | Kozlov, A. N., Gaidoukova, I. S., Uvaev, A. G., Scherbakov, A. B., Filachev, A. M. |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62780A-62780A-5, 5p |
| Databáze: | Complementary Index |
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