The first full-field EUV masks ready for printing.
| Autor: | Mickan, Uwe, Groeneveld, Rogier, Demarteau, Marcel, Peters, Jan Hendrik, Dersch, Uwe, Hess, Günter, Seitz, Holger |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p628105-628105-10, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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