Printability study with polarization based AIMS fab 193i to investigate mask polarization effects.
| Autor: | Zibold, Axel, Stroessner, Ulrich, Poortinga, Eric, Schmid, Rainer, Scherübl, Thomas, Rosenkranz, Norbert, Harnisch, Wolfgang |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p628108-628108-6, 6p |
| Databáze: | Complementary Index |
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