EBM-5000: electron-beam mask writer for 45-nm node.
| Autor: | Sunaoshi, Hitoshi, Tachikawa, Yuichi, Higurashi, Hitoshi, Iijima, Tomohiro, Suzuki, Junichi, Kamikubo, Takashi, Ohtoshi, Kenji, Anze, Hirohito, Katsumata, Takehiko, Nakayamada, Noriaki, Hara, Shigehiro, Tamamushi, Shuichi, Ogawa, Yoji |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p628306-628306-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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