Irradiation resistance of intravolume shading elements embedded in photomasks used for CD uniformity control by local intra-field transmission attenuation.
| Autor: | Zait, Eitan, Ben-Zvi, Guy, Dmitriev, Vladimir, Oshemkov, Sergey, Pforr, Rainer, Hennig, Mario |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62830E-62830E-8, 8p |
| Databáze: | Complementary Index |
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