Advanced mask rule check (MRC) tool.
| Autor: | Kato, Kokoro, Nishizawa, Kuninori, Inoue, Tadao, Kuriyama, Koki, Suzuki, Toshio, Narukawa, Shogo, Hayashi, Naoya |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62830O-62830O-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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