Scatterometry based CD and profile metrology of chrome-less masks using optical digital profilometry.
| Autor: | Lee, Kyung-man, Yedur, Sanjay, Cheng, Wen-hao, Tavassoli, Malahat, Baik, Kiho |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p628313-628313-6, 6p |
| Databáze: | Complementary Index |
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