Fracture friendly optical proximity correction for non-Manhattan features.
| Autor: | Nogatch, John, Lugg, Robert, Miller, Mike, Amoroso, Frank |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62832Q-62832Q-5, 5p |
| Databáze: | Complementary Index |
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