Approximate method of mask flatness factor in focus deviation.
| Autor: | Maejima, Shinroku, Shirai, Seiichiro, Imai, Akira, Nakao, Shuji, Tange, Koji, Chiba, Akira, Hosono, Kunihiro, Narimatsu, Koichiro |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p62833A-62833A-9, 9p |
| Databáze: | Complementary Index |
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