Design-based mask metrology hot spot classification and recipe making through random pattern recognition method.
| Autor: | Cui, Ying, Baik, Kiho, Gleason, Bob, Tavassoli, Malahat |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p63490O-63490O-6, 6p |
| Databáze: | Complementary Index |
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