Optimization of process window simulations for litho-friendly design framework.
| Autor: | Al-Imam, Mohamed, Torres, Andres, Brunet, Jean-Marie, Fakhry, Moutaz, Fathy, Rami |
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| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p63491C-63491C-10, 10p |
| Databáze: | Complementary Index |
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