The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability.
| Autor: | Abdo, Amr, Fathy, Rami, Seoud, Ahmed, Oberschmidt, James, Mansfield, Scott, Talbi, Mohamed |
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| Zdroj: | Proceedings of SPIE; Nov2006, Issue 1, p634923-634923-12, 12p |
| Databáze: | Complementary Index |
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