A mechanism for erosion of optics exposed to a laser-generated EUV plasma.
| Autor: | Arenberg, Jonathan W., McNaught, Stuart, Michaelian, Mark, Shields, Harry, Moyer, Dick, Fornaca, Steve, Martos, Fernando |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2006 Part 2, Issue 1, p64030X-64030X-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|