Laterally deformable optical NEMS grating transducers for inertial sensing applications.
Autor: | Keeler, Bianca E., Bogart, Gregory R., Carr, Dustin W. |
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Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p306-312, 7p |
Databáze: | Complementary Index |
Externí odkaz: |