Thermo-correction of quasi-static optical distortions for EUV lithography.
| Autor: | Dimakov, Sergei A., Kislitsyn, Boris V., Klimentiev, Sergei I., Zhevlakov, Alexander P., Zhuk, Dmitrii I. |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p170-179, 10p |
| Databáze: | Complementary Index |
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