Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS).
| Autor: | Walraven, Jeremy A., Cole Jr., Edward I., Barr, David L., Anderson, Richard E., Kilgo, Alice, Maciel, John J., Morrison, Richard, Karabudak, Nafiz N. |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p165-172, 8p |
| Databáze: | Complementary Index |
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