Modeling the defect inspection sensitivity of a confocal microscope.
| Autor: | Gullikson, E. M., Tejnil, E., Tsai, K.-Y., Stivers, A. R., Kusunose, H. |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p1223-1229, 7p |
| Databáze: | Complementary Index |
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